Simple way of evaluation of thickness of nanometer transparent film SiO in process of its thermally vacuum precipitating

Authors

  • Рудиарий Борисович Бурлаков Dostoevsky Omsk State University, Omsk, Russia

DOI:

https://doi.org/10.25206/1813-8225-2018-161-115-118

Keywords:

nanometer films, thermally vacuum precipitating, thickness evaluation of nanometer film

Abstract

Modified simple way of the evaluation of the thickness an nanometer transparent film SiO in the process of its thermally
vacuum precipitating are considered. For the evaluation of the thickness of the film on the working substrate is used interference colouration of the transparent film, simultaneously precipitated on the checking substrate, situated on vastly smaller distance from the small vaporizer, in contrast with the distance from the small vaporizer before the working substrate. Using of this way allows simplifying a technology of the fabrication of nanometer transparent films.

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Author Biography

Рудиарий Борисович Бурлаков, Dostoevsky Omsk State University, Omsk, Russia

кандидат физико- математических наук, доцент (Россия), доцент кафедры «Прикладная и медицинская физика».

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Abstract views: 6

Published

2018-11-23

How to Cite

[1]
Бурлаков, Р.Б. 2018. Simple way of evaluation of thickness of nanometer transparent film SiO in process of its thermally vacuum precipitating. Omsk Scientific Bulletin. 5(161) (Nov. 2018), 115–118. DOI:https://doi.org/10.25206/1813-8225-2018-161-115-118.

Issue

Section

Instrument Engineering, Metrology and Information-Measuring Devices and Systems

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