Formation of nanostructured carbon layers on silicon substrate using polyvinyl chloride as carbon precursor

Abstract

The carbon layers are obtained by low-temperature (200–400°C) thermal transformation of polyvinylenes deposited on silicon
substrates by spin-coating method. Polyvinylenes are obtained by dehydrochlorinating polyvinyl chloride under the action of
aniline in dimethyl sulfoxide. Dehydrochlorination of the polymer is carried out in the presence of Fe (NO3)2 for the introduction of the metal into the carbon layer composition. The morphological features of the formed layers structure are investigated by the method of atomic force microscopy (AFM). It is found that carbon layers without metal additives are macroporous with through pores of submicron sizes. Solid carbon layers with metal-containing nanoparticles embedded in the carbon matrix are formed in the presence of iron. The obtained results can be used to improve the element base of microelectronic devices.