Gas-sensitive properties of por-SiO2/SnOx multilayer structures

Authors

  • Екатерина Александровна Росликова Omsk Scientific Center of the Siberian Branch of the Russian Academy of Sciences, Omsk, Russia
  • Владислав Евгеньевич Росликов Omsk Scientific Center of the Siberian Branch of the Russian Academy of Sciences, Omsk, Russia
  • Константин Евгеньевич Ивлев Omsk Scientific Center of the Siberian Branch of the Russian Academy of Sciences, Omsk, Russia

DOI:

https://doi.org/10.25206/1813-8225-2018-159-107-109

Keywords:

porous silicon, multilayer structures, tin oxide, gas sensitive properties

Abstract

Multilayer structures based on macroporous silicon and tin oxide with platinum are obtained. By scanning electron microscopy
(SEM), it is found that tin oxide uniformly covers the surface of macroporous silicon. The EDA data shows the existence of platinum in the nanocomposite. Investigation of gas sensitive properties shows that the obtained test structures with platinum have a higher sensitivity to CO and CH4 gas molecules at a temperature of 150 °C than structures with tin oxide without platinum.

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Author Biographies

Екатерина Александровна Росликова, Omsk Scientific Center of the Siberian Branch of the Russian Academy of Sciences, Omsk, Russia

младший научный сотрудник лаборатории физики наноматериалов и гетероструктур.

Владислав Евгеньевич Росликов, Omsk Scientific Center of the Siberian Branch of the Russian Academy of Sciences, Omsk, Russia

младший научный сотрудник лаборатории физики наноматериалов и гетероструктур.

Константин Евгеньевич Ивлев, Omsk Scientific Center of the Siberian Branch of the Russian Academy of Sciences, Omsk, Russia

младший научный сотрудник лаборатории физики наноматериалов и гетероструктур.

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Abstract views: 2

Published

2018-07-04

How to Cite

[1]
Росликова, Е.А., Росликов, В.Е. and Ивлев, К.Е. 2018. Gas-sensitive properties of por-SiO2/SnOx multilayer structures. Omsk Scientific Bulletin. 3(159) (Jul. 2018), 107–109. DOI:https://doi.org/10.25206/1813-8225-2018-159-107-109.

Issue

No. 3(159) (2018)

Section

Instrument Engineering, Metrology and Information-Measuring Devices and Systems

License

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