Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump

Authors

  • Elena Vladimirovna Svichkar Bauman Moscow State Technical University, Russia, Moscow
  • Nikolai Konstantinovich Nikulin Bauman Moscow State Technical University, Russia, Moscow
  • Konstantin Evgen’yevich Demihov Bauman Moscow State Technical University, Russia, Moscow

DOI:

https://doi.org/10.25206/2588-0373-2018-2-1-65-71

Keywords:

vacuum system, pumping characteristic, forvacuum, pressure, turbomolecular pump, conductivity, speed of action, flow

Abstract

The pumping characteristic of a high-vacuum system depends on a number of factors: the pumping characteristics of a high-vacuum turbomolecular pump (TMN), the conductivity of connecting lines, the pumping characteristics of a for vacuum pumping system, the leakage of gas into the system, namely gas release streams, gas flows due to leakage of structural elements. The influence of these factors on the pumping characteristic of the vacuum system with TMN is considered in the work. A method for determining the parameters of a fore-vacuum pump providing an improvement in the vacuum characteristics of a vacuum system with TMN at elevated suction pressures is proposed.

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Author Biographies

Elena Vladimirovna Svichkar, Bauman Moscow State Technical University, Russia, Moscow

Candidate of Technical Sciences, Assosiate Professor of Vacuum and Compressor Equipment Department.

Nikolai Konstantinovich Nikulin, Bauman Moscow State Technical University, Russia, Moscow

Candidate of Technical Sciences, Assosiate Professor of Vacuum and Compressor Equipment Department.

Konstantin Evgen’yevich Demihov, Bauman Moscow State Technical University, Russia, Moscow

Doctor of Technical Sciences, Professor, Head of Vacuum and Compressor Equipment Department.

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Published

2018-05-18

How to Cite

Svichkar Е. В., Nikulin Н. К., & Demihov К. Е. (2018). Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump. Omsk Scientific Bulletin. Series «Aviation-Rocket and Power Engineering», 2(1), 65–71. https://doi.org/10.25206/2588-0373-2018-2-1-65-71

Issue

Section

Power and chemical engineering

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